Dissertation > Industrial Technology > Radio electronics, telecommunications technology > Basic electronic circuits > Variable energy converter

A flexible substrate on the miniature transducer technology

Author WangYan
Tutor MaBingHe
School Northwestern Polytechnical University
Course Microelectromechanical systems and nanotechnology
Keywords Flexible substrate Actuator Tactile sensor Polyimide Silastic
Type Master's thesis
Year 2007
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Flexible MEMS device has a very broad application prospects. In this paper, a flexible substrate -based miniature transducer for the study, the flexible substrate technology for MEMS conduct research , design and development of the bubble -type micro-actuator and the flexible tactile sensor . Paper describes the polyimide-based , PDMS based, metal -based flexible substrate in three different groups of the miniature transducer technology implementation. For metal based flexible micro- transducer method, developed a system for active flow control actuator micro bubbles . Design of the micro actuator structure , and its deformation behavior simulation analysis. Using photolithography , etching, spin coating production process of the bubble micro actuator . Through the pressure of the bubble sample load - deformation behavior tests , indicating that the actuator has a good linearity and a large carrying capacity. Combined with specific airfoil wind tunnel experiment to test micro-actuator actuation can affect the airfoil surface pressure distribution , which can be used to control the growth promotion purposes. Through the polyimide-based and PDMS -based miniature transducer research, design a flexible tactile sensor micro switch . On tactile sensor structure was designed and analyzed by simulation studies the deformation behavior of different structural dimensions influence the structure and size has been optimized . According to the design of the sensor structure , proposed two tactile sensor substrate material processing technology , and the use of copper clad polyimide film, produced a micro- tactile sensor .

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