A flexible substrate on the miniature transducer technology
|School||Northwestern Polytechnical University|
|Course||Microelectromechanical systems and nanotechnology|
|Keywords||Flexible substrate Actuator Tactile sensor Polyimide Silastic|
Flexible MEMS device has a very broad application prospects. In this paper, a flexible substrate -based miniature transducer for the study, the flexible substrate technology for MEMS conduct research , design and development of the bubble -type micro-actuator and the flexible tactile sensor . Paper describes the polyimide-based , PDMS based, metal -based flexible substrate in three different groups of the miniature transducer technology implementation. For metal based flexible micro- transducer method, developed a system for active flow control actuator micro bubbles . Design of the micro actuator structure , and its deformation behavior simulation analysis. Using photolithography , etching, spin coating production process of the bubble micro actuator . Through the pressure of the bubble sample load - deformation behavior tests , indicating that the actuator has a good linearity and a large carrying capacity. Combined with specific airfoil wind tunnel experiment to test micro-actuator actuation can affect the airfoil surface pressure distribution , which can be used to control the growth promotion purposes. Through the polyimide-based and PDMS -based miniature transducer research, design a flexible tactile sensor micro switch . On tactile sensor structure was designed and analyzed by simulation studies the deformation behavior of different structural dimensions influence the structure and size has been optimized . According to the design of the sensor structure , proposed two tactile sensor substrate material processing technology , and the use of copper clad polyimide film, produced a micro- tactile sensor .