Dissertation
Dissertation > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > Transmitter ( converter),the sensor > Physical sensors > Light sensor

Monocrystalline silicon absorption type optical fiber temperature sensor explore

Author ZhangShaoHua
Tutor LinYanFang
School Zhejiang University
Course Microelectronics and Solid State Electronics
Keywords Optical fiber temperature sensor Absorption type Monocrystalline The temperature - sensitive material Temperature sensing element Transmission characteristics Semiconductor Microfabrication Anisotropic Process methods
CLC TP212.14
Type Master's thesis
Year 2003
Downloads 206
Quotes 4
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The use of semiconductor light absorption principle , a novel semiconductor absorption type optical fiber temperature sensor . The sensor uses the monocrystalline semiconductor material is a temperature-sensitive material . It has a wide temperature range ; mature single crystal silicon the sensitive material preparation , processing , and therefore have a broader development prospects . Currently in the country has not been reported . The papers on the basis of the transmission characteristics of the theoretical analysis monocrystalline the anisotropic etching deep grooves process microfabrication method 10um ~ 20um monocrystalline temperature-sensitive film , and the use of transmission-type sensor structure . This method to the preparation temperature sensing element with micromachining technology is the first of its kind to date . The experimental results show that in the temperature range of 10 ° C to 100 ° C , the linearity of the sensor can reach 1 . About 5% , while the obtained sensitivity about 1mV/oC .

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