Monocrystalline silicon absorption type optical fiber temperature sensor explore
|Course||Microelectronics and Solid State Electronics|
|Keywords||Optical fiber temperature sensor Absorption type Monocrystalline The temperature - sensitive material Temperature sensing element Transmission characteristics Semiconductor Microfabrication Anisotropic Process methods|
The use of semiconductor light absorption principle , a novel semiconductor absorption type optical fiber temperature sensor . The sensor uses the monocrystalline semiconductor material is a temperature-sensitive material . It has a wide temperature range ; mature single crystal silicon the sensitive material preparation , processing , and therefore have a broader development prospects . Currently in the country has not been reported . The papers on the basis of the transmission characteristics of the theoretical analysis monocrystalline the anisotropic etching deep grooves process microfabrication method 10um ~ 20um monocrystalline temperature-sensitive film , and the use of transmission-type sensor structure . This method to the preparation temperature sensing element with micromachining technology is the first of its kind to date . The experimental results show that in the temperature range of 10 ° C to 100 ° C , the linearity of the sensor can reach 1 . About 5% , while the obtained sensitivity about 1mV/oC .