Study of the Inner Flow of Vortex Stage and the Vibrancy of Rotor System in High Vacuum Dry Pump
|Course||Fluid Machinery and Engineering|
|Keywords||high vacuum dry pump vortex numerical simulation vibrancy CFD|
In recent years, as the vacuum technology develop fleetly and the elevation of the customs’needs, the people start to develop various types of high vacuum dry pumps, which can and already widely used in the semiconductor industry, analytical instruments, electronic industries.Here we take the design of the high vacuum dry pump as an example, and introduced the pump’s structures and its working principle, especially studied the performance of vortex. Moreover, because of the high rotating speed and its horizontal structure, it is necessary to study the rotor system’s vibrancy and do some modification in dimension.For the structure designing part,we applied holweck stage and vortex structure For the driven part I applied one axis and put the engine inside.For the vortex structure, because of there is not enough information about its theory and designing method to catch, so it is necessary to study more of the structure, and we can use the results in designing work. For this part what I have mainly done as follows.1. Introduced the vortex pump’s working principle and flowing theory inside the channel.2. Make the model of the flowing zone with pro/Engineer, and meshed the zone use GAMBIT.3. Based on the RNG k-εturbulence model, use FLUENT to calculate the inner flow of vortex pump with different design parameter. Through the numerical simulation, we can study the internal flow law of vortex pump, and learn the pressure and velocity distribution in the channel.4. Optimized the structure and the dimensions of the vortex pump based on the results.In the study of the rotor system’s vibrancy, because it is a assembly, we need to use the Component Mode Synthesis to get the natural frequency of the system. In this part we introduced what the Component Mode Synthesis is and its common process, the analysis process. At last we check the natural frequency of the system whether allowed for the design rules, if not, we got some changes.