The Implementation and Application of Total Tool performance Tracing System in FAB
|Keywords||CIM EAP TTPT|
In Fabs, the cost of process tools is the most important component in overall company cost architecture. The performance of tool will have a direct impact on our cost and profit, so enhance the performance of tool always is the focus issue in Foundry. In the article, described how to make process equipment reach the maximum capacity in the theoretical via CIM system, to reduce costs and raise profits. In this study, the automatic control machine is necessary; in other words, Equipment Automatic Program (EAP) is the foundation of our study. Combining EAP system and Manufacture Execution System (MES) together, to control every LOT could be processed smoothly, collecting the necessary data while control the equipment automatically; these detail process data of equipments could be our data source in our study. The Tool Type complexity coupled by the rapid ramp up of our Fabs makes it increasingly hard to maintain the efficiency of our tools. When we analysis the collecting data, the same problem was meet. So we should make the suitable algorithm, according to the different program of the tools. We should achieve collecting and adjust WPH (wafer per hour) automatically, to monitor the process tools’utilization, and to monitor and analysis production data.So a well designed indices report and tracing system is very important to ensure all process tool are well utilized to make a max profit.For improve the utilization of process equipments, SMIC set up a project team. The project team design and develop the TTPT system, implement a tool performance tracing system for all the SMIC tools is the target of the project. The project team finished the design for TTPT system, and deploys the system in Shanghai site firstly. I’m responsible for the deployment in Tianjin site for this project, includes:set up database, extracting and parsing EAP data, design and archive the formula of WPH, deploy the TTPT UI-WMS system and deploy the service on web site. Above all items were design and deployed by me.