The thermal structure design of precision temperature control system of the photoetching machine

Super-large-scale integrated circuit has been swiftly developed, thus, the demandfor the key equipment of manufacturing this integrated circuit——photolithographymachine, has been much higher. And the development of this photolithography machinemust base on the high-precision temperature control device. So, the study on thehigh-precision temperature control device of the photolithography machine is verysignificant.This study roots in the “Cooling water temperature control system of thephoto-etching machine projection lens”, which is the subproject of The Major NationalProject2002“193nanometer photo-etching machine”, and mainly focus on the researchof the heat structure design of this system, which is researching and designing thesubsystem of the heat exchange. This study based on the relevant theories of the heattransfer and the fluid control equation, combined with the relevant experiences of thetemperature control device of the photolithography machine at home and abroad, andintegrated the research demand, then put forward an overall plan of this heat exchangesubsystem, in the meanwhile, emphasized on the study of the essential constituent partof this subsystem.During the process of designing the refrigeration module, the semiconductorrefrigeration technology was chosen. Combining with the fluid thermodynamics finiteelements analysis software (EFD.Pro9.0), the fluid thermodynamics simulation of thecold junction of the refrigeration module was developed and analyzed. The influences tothe refrigeration performances of the refrigeration module, such as: the materials, theflowing rate of the re-circulating water, the installation methods of the thermoelectriccooler, and the fin results parameters were discussed. Moreover, the relevant parametersof this refrigeration module in this study was optimized, thus the high efficiency of theheat exchange and the power refrigeration were actualized. After that, the design of theheating tanks and the circulating pipe network system was completed. Some majormeasures in the field of sealing and reducing the heat waste was adopted and someanalysis and exploration in the field of the fluid thermodynamics simulation was proceeded; while, in the process of designing the circulating pipe network system, threedesigning works of the circulation loop was prior completed and the model selectionand calculation of the pumping pressures, the pipe diameters and the relevantaccessories was finished.At the end of this study, the installation and the debugging of the experimentalprototype was accomplished. It turned out that the performances and the parameters ofthe experimental prototype are satisfying, which corresponded with the requirement ofthe project temperature precision control within±0.01℃and the power refrigeration.