Dissertation
Dissertation > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Data processing, data processing system > Data collection and processing systems

Research of Nano-micro Displacement Sensor’s Signal Acquisition and Processing for the AFM

Author ChenRenBing
Tutor YuYong
School University of Science and Technology of China
Course Detection technology and automation devices
Keywords Weak Signal Nanoscale displacement sensor ( micro ) Nano - displacement measurement Virtual instrument
CLC TP274.2
Type Master's thesis
Year 2010
Downloads 142
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21st century is the era of nanotechnology, countries around the world will nanotechnology research, nanotechnology will bring enormous social and economic development as a national development strategy. Nanotechnology research needs through a variety of observation and manipulation tools, such as atomic force microscope (AFM) are widely used in nano observed AFM for nano-scale operation, indeed, there are many problems, such as: the output of the piezoelectric drive probe nanometer displacement ceramic hysteresis, creep and nonlinear shortcomings affect the static and dynamic properties of nanoscale drive. Although many literature study and improvement of non-linearity and hysteresis of the piezoelectric ceramic, such as the drive voltage control model, but this method will result in the entire positioning system is a complex nonlinear system, seriously affect the high-precision control of the nanomanipulation , limiting the further application of the piezoelectric ceramic in nano environment. Aiming micro (nano) environment, the driving characteristics of the PZT drive developed a real-time measurement of the piezoelectric ceramic nano displacement sensor, extraction of the weak signal, based on the displacement of the negative feedback of the closed-loop control method, to improve the nonlinearity of the piezoelectric ceramic provide a simple method for the use of real-time operation of the AFM nanoscale and hysteresis. This article is based on a nano-environment of the National Natural Science Foundation of China \work is based on the use of micro and nano displacement of CAS Shenyang Institute of Automation of micro-nano lab test platform developed sensors can to obtain PZT real-time driver displacement information. The main contents of this paper are as follows: 1. Optimize the mechanical structure of the sensor size, improve sensor zoom ratio and work together effect. And, in the case of laboratory no accumulation, design verification and real-time measurement of online rapid prototype algorithm combined joint development model. 2. Nano displacement information for the establishment of the system: the characteristics of the weak signal processing, you need to try to study the effect of a variety of algorithms. Designed based on a combination of acquisition card and Labview software program via the SPI port based on the the DSP2812 real-time data acquisition system, the introduction of external 24 AD CPU processing. The program can help achieve fast verification algorithm and analysis of signal characteristics; program two will miniaturization, easy the the nanometer displacement information feedback to the control port. 3. Weak signal processing research: through the analysis of signal amplitude-frequency characteristics, design weak signal amplification circuit combines the advantages of analog filtering and digital filtering, respectively, with a fifth-order Butterworth low-pass filter and algorithm based on wavelet transform filter and FIR embedded DSP-based filtering, achieve the purpose of noise reduction signal. Elaborate structures based on the force platform and two sets of PI platform sensor test system: The system can not only linear calibration sensor working curve, but also be able to study the static characteristics and dynamic characteristics of the sensor. From the platform structure, the principle of platform testing and calibration processes do the detail, and obtained through the platform and the design of the access to information system after the sensor signal processing performance, the experimental results are discussed.

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