Dissertation > Mathematical sciences and chemical > Crystallography > Crystal physics > The optical properties of the crystal

Two-dimensional Tunable Bandgap Photonic Crystals Based on VO2 Phase Transition

Author HaoJi
Tutor ChenChangHongï¼›ZuoDingShan
School Huazhong University of Science and Technology
Course Optical Engineering
Keywords Vanadium dioxide film Phase change Tunable bandgap photonic crystal Reactive dc magnetron sputtering
CLC O734
Type Master's thesis
Year 2011
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Vanadium dioxide ( VO 2 < / sub > ) is a functional material having a phase change characteristics by heating or by carrier injection , VO 2 occurs semiconductor phase to the metal phase of the reversible phase change, in the phase change process , VO 2 < / sub> , resistivity , optical constants , and other physical properties will mutate . Based on its phase transition characteristics , VO 2 is widely used in photoelectric detection , optical storage, optical communications and other fields . This paper studies the VO 2 thin films and thin film performance testing . Discusses in detail the process for using reactive dc magnetron sputtering VO 2 film ; using high-resolution X -ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM) tests analyze the VO < sub> 2 film component and the lattice structure . Secondly , this paper based on the VO 2 before and after the phase transition , the optical constants change using Rsoft7.0 software to design analog the based on VO lines 2 phase transition tunable bandgap photonic crystal . VO 2 dispersion curve ; design a tetragonal structure and two-dimensional hexagonal structure VO 2 - air photonic crystal semiconductor phase and metal phase , and were simulated through software simulation VO 2 to that by VO photonic band gap of the semiconductor phase and metal phase two structures , photonic bandgap 2 < / sub> phase transition photon the band gap of the crystal to produce significant regulatory role ; Fixed structural parameters of the photonic crystal of the two structures according to the specific process conditions , simulate the corresponding photonic band gap , and designed for the production of photonic crystal optical reticle . Finally, the use of lithography and dry etching prepared the based on VO lines 2 phase transition of a two-dimensional adjustable bandgap photonic crystal . Summed VO 2 film dry etching process parameters , and etching photonic crystal morphology detection using optical microscope and scanning electron microscope (SEM) , the ideal photonic crystals . Two-dimensional photonic crystal tunable bandgap the preliminary micro Fourier transform infrared spectroscopy (FTIR) test and terahertz (THz) band variable temperature test , specific photonic crystal transmittance spectra analysis did not find significant photon The band gap, will be further testing .

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