Two-dimensional Tunable Bandgap Photonic Crystals Based on VO2 Phase Transition
|School||Huazhong University of Science and Technology|
|Keywords||Vanadium dioxide film Phase change Tunable bandgap photonic crystal Reactive dc magnetron sputtering|
Vanadium dioxide ( VO 2 < / sub > ) is a functional material having a phase change characteristics by heating or by carrier injection , VO 2 sub > occurs semiconductor phase to the metal phase of the reversible phase change, in the phase change process , VO 2 < / sub> , resistivity , optical constants , and other physical properties will mutate . Based on its phase transition characteristics , VO 2 is widely used in photoelectric detection , optical storage, optical communications and other fields . This paper studies the VO 2 thin films and thin film performance testing . Discusses in detail the process for using reactive dc magnetron sputtering VO 2 sub > film ; using high-resolution X -ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM) tests analyze the VO < sub> 2 film component and the lattice structure . Secondly , this paper based on the VO 2 sub > before and after the phase transition , the optical constants change using Rsoft7.0 software to design analog the based on VO lines 2 sub > phase transition tunable bandgap photonic crystal . VO 2 dispersion curve ; design a tetragonal structure and two-dimensional hexagonal structure VO 2 - air photonic crystal semiconductor phase and metal phase , and were simulated through software simulation VO 2 to that by VO photonic band gap of the semiconductor phase and metal phase two structures , photonic bandgap 2 < / sub> phase transition photon the band gap of the crystal to produce significant regulatory role ; Fixed structural parameters of the photonic crystal of the two structures according to the specific process conditions , simulate the corresponding photonic band gap , and designed for the production of photonic crystal optical reticle . Finally, the use of lithography and dry etching prepared the based on VO lines 2 sub > phase transition of a two-dimensional adjustable bandgap photonic crystal . Summed VO 2 film dry etching process parameters , and etching photonic crystal morphology detection using optical microscope and scanning electron microscope (SEM) , the ideal photonic crystals . Two-dimensional photonic crystal tunable bandgap the preliminary micro Fourier transform infrared spectroscopy (FTIR) test and terahertz (THz) band variable temperature test , specific photonic crystal transmittance spectra analysis did not find significant photon The band gap, will be further testing .