Dissertation > Industrial Technology > Radio electronics, telecommunications technology > Radio equipment,telecommunications equipment > Feeder equipment ( transmission lines and waveguides ) > Waveguide,the waveguide,the waveguide transmission line

Micro Napo guide grating and its manufacturing technology research

Author ZhangYiWen
Tutor YuYongLin
School Huazhong University of Science and Technology
Course Optical Engineering
Keywords Bragg Grating Nanoimprint technology Distributed feedback semiconductor laser Transfer matrix method
Type Master's thesis
Year 2011
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Bragg grating structures because of the good selective reflection wavelength specific role, and in the growing optical fiber communication system, in particular WDM system, to be more widely applied . It is widely used to produce an optical filter , a semiconductor laser , fiber optic sensors, optoelectronic devices , the device performance largely depends on the quality of the built Bragg grating . Since the concept was put forward after Bragg Gratings , explore simple, low-cost processing method it has not stopped. Nanoimprint as a new micro-nano graph structure processing methods, high resolution, low cost, high yield and easy operation and a series of advantages , application prospect. In this paper, distributed feedback semiconductor lasers and DBR -type tunable semiconductor lasers for the study, based on nano- imprint technology around making laser waveguide grating launched a series of research and exploration. Specifically as follows: ( 1 ) brief description of the structural characteristics of the Bragg grating and the basic theory outlined including laser holography and electron beam lithography , including the exposure , the conventional micro-nano grating processes. ( 2 ) Details of the nanoimprint technology, including its typical process and the process used for embossing templates, embossing plastic and other material requirements . ( 3 ) by introducing an intermediate soft templates and a new process, the traditional nanoimprint method to improve, greatly improving fault tolerance and its embossed pattern transfer effects, and graphics on the subsequent etching process was research . ( 4 ) for the preparation of the nano- imprint method of the Bragg grating structure of various types , including a uniform grating, the phase shift grating and sampling grating ; subsequently introduced distributed feedback grating laser, laser performance test , and the processing error Bragg Gratings analyze and study .

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