Micro Napo guide grating and its manufacturing technology research
|School||Huazhong University of Science and Technology|
|Keywords||Bragg Grating Nanoimprint technology Distributed feedback semiconductor laser Transfer matrix method|
Bragg grating structures because of the good selective reflection wavelength specific role, and in the growing optical fiber communication system, in particular WDM system, to be more widely applied . It is widely used to produce an optical filter , a semiconductor laser , fiber optic sensors, optoelectronic devices , the device performance largely depends on the quality of the built Bragg grating . Since the concept was put forward after Bragg Gratings , explore simple, low-cost processing method it has not stopped. Nanoimprint as a new micro-nano graph structure processing methods, high resolution, low cost, high yield and easy operation and a series of advantages , application prospect. In this paper, distributed feedback semiconductor lasers and DBR -type tunable semiconductor lasers for the study, based on nano- imprint technology around making laser waveguide grating launched a series of research and exploration. Specifically as follows: ( 1 ) brief description of the structural characteristics of the Bragg grating and the basic theory outlined including laser holography and electron beam lithography , including the exposure , the conventional micro-nano grating processes. ( 2 ) Details of the nanoimprint technology, including its typical process and the process used for embossing templates, embossing plastic and other material requirements . ( 3 ) by introducing an intermediate soft templates and a new process, the traditional nanoimprint method to improve, greatly improving fault tolerance and its embossed pattern transfer effects, and graphics on the subsequent etching process was research . ( 4 ) for the preparation of the nano- imprint method of the Bragg grating structure of various types , including a uniform grating, the phase shift grating and sampling grating ; subsequently introduced distributed feedback grating laser, laser performance test , and the processing error Bragg Gratings analyze and study .