Detection Circuit Design for Resonant Micro-machined Pressure Sensor
|School||North China Electric Power University (Beijing)|
|Course||Signal and Information Processing|
|Keywords||Resonant micromachined pressure sensors Detecting circuit Co-channel interference Temperature compensation|
Resonant micromachined pressure sensors is achieved by detecting the change of the mechanical resonator resonant frequency pressure measurement , is characterized by small size, high accuracy , good stability , easy interface and digital circuits , and has broad application prospects . The accurate measurement of micromachined pressure sensors objective of the study , the detection circuit performance directly affect the overall device measuring the effect , this paper focuses on the study resonant micromachined pressure sensor detection circuit . The paper analyzes the structure and working principle of micro- mechanical pressure sensor , the overall design of the detection circuit , and designed a closed - loop excitation circuit and differential detection circuit , the production of PCB board ; analysis of micro-mechanical pressure sensor co-channel interference factors , and design a circuit with a two-terminal non- symmetrical excitation frequency interference canceller ; micromechanical pressure sensor , temperature drift, temperature compensation is given program . Further work laid the foundation for the research of micro-mechanical pressure sensor .