Dissertation
Dissertation > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > General issues > The semiconductor device manufacturing process and equipment

Etching solution in 90nm and below copper diffusion advanced technology

Author ZhongZuoSheng
Tutor JiangGuoBao
School Fudan University
Course IC Engineering
Keywords Copper interconnect process Damascus craft Copper diffusion Copper Finish Through hole protection
CLC TN305
Type Master's thesis
Year 2011
Downloads 79
Quotes 0
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