Dissertation > Industrial Technology > Metallurgy and Metal Craft > Metallurgy and Heat Treatment > Metal corrosion protection,metal surface treatment > Corrosion control and protection > Metal surface protection technology

Plasma immersion ion implantation and the study of the magnetic properties of the plasma

Author LiLinSen
Tutor LiangRongQing
School Fudan University
Course Plasma Physics
Keywords Inductively coupled plasma source (ICP) Plasma immersion ion implantation (PIII) Left-handed materials (LHM) Right-handed material (RHM) Negative refraction
CLC TG174.4
Type Master's thesis
Year 2008
Downloads 63
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The whole paper consists of two parts, the first part is mainly introduced plasma immersion ion implantation, the second part of the physical principles of plasma properties of negative refraction Contact. The first portion, a plasma immersion ion implantation (PIII) originated in the conventional ion implantation technique. Has a great advantage compared to plasma immersion ion implantation with conventional ion implantation, is all raw material is injected into the ion to such plasma immersion ion implantation quasi-effective solution to traditional ion implantation straight, plasma immersion implantation broader application in the industrial field. This chapter first introduces the status quo and the advantages and disadvantages of plasma immersion ion implantation; Secondly, the basic principles for the experimental probe system; Then we introduce a plasma source used in the experiment, we designed a species novel helical coupling antenna, as compared with the conventional coupling antenna, the the novel coupling antenna well improve the uniformity of the plasma source. Finally, we introduce plasma immersion ion implantation negative high voltage pulse power and plasma immersion ion injection studies used in the preparation of P-type ZnO films, this method was found to effectively reduce the concentration of electrons, increased material resistor; if possible to further optimize the process, it can certainly obtain the quality of the P-type ZnO film. The second part, in recent years the left hand of the medium (left-handed medium, LHM) and negative refraction phenomena extensively studied because of its unique physical properties and novel applications. The Doppler shift of the reversal and Cerenkov radiation reverse these unusual physical characteristics also left hand appears in the medium. The electromagnetic properties of the material is determined by the permittivity and permeability are two important parameters, dielectric permittivity and magnetic permeability combined electromagnetic wave propagation in the medium. Usually the case material ε and u are positive, but for the left-hand of the medium ε and u are negative, in this material, the refractive index n <0. In the plasma, if the frequency of the electromagnetic wave is less than the frequency of the plasma, a plasma on the electromagnetic wave will exhibit negative dielectric, so that the electromagnetic wave will exist in the form of evanescent wave; Also, because the plasma itself is a anti-magnetic media, then the ability to make the permeability of the plasma is negative? projections In this article, we use the analytical method issues and research, we found that plasma electromagnetic waves can only achieve its permittivity is negative, while not simultaneously so that its permeability is also negative.

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