The Design and Development of Three-station CMP Control System
|School||Dalian University of Technology|
|Course||Mechanical and Electronic Engineering|
|Keywords||The CMP machine tools of the three-position Control system UML Multi-View Communication OpenGL|
Currently , chemical mechanical polishing (CMP) technology is considered to be able to achieve the surface of the wafer partially flattened and the best method of global planarization . The CMP device is the CMP technology hardware based on CMP technology to achieve protection . The CMP control system is an important part of the CMP apparatus , it is necessary technical support for the development of the CMP apparatus having a high surface machining accuracy . According to the three - station the CMP machine tools of functional requirements analysis and design of the control system hardware . As the function of each station , separate design and development can be divided into three units . The monitoring and control functions of the units of the polishing pressure is the pressure of the collected polishing PID operation, and the operation result through the D / A port feedback control polishing pressure, to form a closed-loop control of the polishing pressure ; vacuum adsorption and recoil unit's function is real - time monitoring of vacuum pressure and adsorption and recoil silicon ; polishing head and polishing discs motion control unit with a PC motion control cards servo controller \rotation and other functions . According to the three - station the CMP machine tools of functional requirements analysis and design of the control software of the control system . Using UML for modeling the system control structure , based on the detailed analysis of the the CMP system function architecture , then to the conversion of the C code implementation model of forward engineering using Rational Rose 2003 , final system developed on this basis, with VisualC and implementation. The object-oriented thinking , the control function modules package of the class focuses on the realization of the multi-view communication as well as using OpenGL software visualization the CMP software development and other key technologies . The control system hardware structures and control system hardware and software debugging , and debugging based on the improvement of the system hardware and software . The test results show that the three-position the CMP control system to achieve the desired control requirements , which laid the foundation for the development of three-position CMP equipment and its control system .