Dissertation > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics > Film growth,structure and epitaxy

Study on the Preparation and Properties of Smooth Diamond-like Carbon Films

Author LiuXingHua
Tutor CaiCongZhong;WuWeiDong
School Chongqing University
Course Condensed Matter Physics
Keywords Diamond-like carbon film Low - pressure plasma enhanced chemical vapor deposition Structure Surface morphology Performance
CLC O484.1
Type Master's thesis
Year 2008
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Quotes 1
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