Dissertation > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > Transmitter ( converter),the sensor > Physical sensors > Light sensor

Theoretic Research on Fiber Accelerometer of MEMS

Author ZhangWeiLiang
Tutor FangXiaoYong
School Yanshan University
Course Condensed Matter Physics
Keywords MEMS Fiber Optic Sensors Acceleration sensor Structural design Michelson interferometer
CLC TP212.14
Type Master's thesis
Year 2010
Downloads 130
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Micro- acceleration sensor has the characteristics of high reliability, high sensitivity , has received extensive attention in the automotive industry, aerospace , bio- and medical fields . At present, most of the micro - acceleration sensor measuring principle capacitive, piezoresistive , thermocouple more mature structure for optical micro-accelerometer , and the combination of fiber and mature optical fiber sensing technology acceleration sensor little research . Paper application of MEMS technology and optical fiber interferometer principle of combining a fiber optic micro - acceleration sensor , the sensing mechanism of the system , the optical system , the signal processing system research . To a certain extent hard to narrow down the problem to solve ordinary fiber optics made ??size , while at the same time to make up for the integrated optical waveguide device fabrication high degree of difficulty and loss greater shortcomings and deficiencies . This paper first introduces the research status and development trend at home and abroad on the micro- acceleration sensor , discussed the basic principles of optical fiber sensing technology , analysis of several typical phase modulation interferometer interference principle , for later acceleration measurement theory foundation. Secondly, the Michelson interferometer -type fiber-optic accelerometer structure and working principle conducted in-depth research . Departure from the sensing principle , discussed and derived light propagation time drive in the optical path difference change . The working process of the fiber optic accelerometer : The sensitive components feelings outside of the acceleration signal , and to transform it into a Michelson interferometer fringes mobile number of mobile interference fringes which represents the measured acceleration values ??. Again , the use the material mechanics principles to establish the displacement of the mass equation of motion , and they are linked with the measurement of interference fringes Live , in order to achieve the conversion of the motion amount to the amount of optical analysis of the various design parameters of the sensing system of the sensor range , resolution and measurement accuracy , performance , given the theoretical value of the design parameters of the selection principles as well as technical indicators . Finally, due to the accelerometer output signal is usually subject to random noise interference , so the acceleration sensor noise sources , and on this basis , some of the possible solutions .

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