Surface Quality Study with the Electrolytic In-Process Dressing (ELID) on Quartz Glass
|Keywords||Electrolytic In-Process Dressing quartz glass ductile region feed rate rotation speed|
In this paper, the Electrolytic In-Process Dressing （ELID） for quartz glassin ductile region has been studied. ELID technology can improve themachining precision and reduce the roughness of the glass. The quartz glasswith high precision and low roughness has been made by using diamondgrinding wheel bonded by short cast iron fibers and GM73-Ⅲ surface grindingmachine. The quartz glass had been fixed on batholiths by melting olefinduring the process. The technological parameters such as electrolysis current,the rotation speed of grinding wheel and the feed rate etc, have been optimized.The effect of the rotation speed of the grinding wheel and the feed rate hasbeen researched. The grinding surface of quartz glass has been observed andanalyzed by XP-2TM and AFM. The flatness of sample has been measured byJD22. The grinding mechanism in microcosmic and the ductile region of quartzglass has been discussed.The experimental results show that the grinding wheel hole decrease andits configuration become tightness after the CeO2 has been joined into thegrinding wheel. The combinative performance between the body of grindingwheel and diamond was improved. In this paper grinding wheel has beenelectrolyzed in different conditions. The best parameter is duty cycle of 50%,frequency of 5000 Hz and tension of 4.6 V. A flat oxide of Fe3O4 has been lefton the surface of grinding wheel that can prevent the excessive electrolyte. Theroughness of surface improves with the increasing of feed rate. The surfaceroughness first decreases and then increases as the rotation speed increases.These best grinding conditions are granularity of the grinding wheel of 5 μm, afeed rate of 1 μm, and a rotation speed of 2060 rpm. The quartz glass is groundin the ductile mode under the best grinding conditions. Its roughness is 14.8nm.